Veyret, D. ; Georgiadou, M. ; Sani, R.L. ; Verhoff, M. ; Alkire, R.C.
出版情報:
Fundamental aspects of electrochemical deposition and dissolution : proceedings of the international symposium. pp.405-412, 1999. Pennington, New Jersey. Electrochemical Society
Georgiadou, M. ; Papapanayiotou, D. ; Veyret, D. ; Sani, R.L. ; Alkire, R.C.
出版情報:
Electrochemical processing in ULSI fabrication III : proceedings of the international symposium. pp.134-144, 2000. Pennington, N.J.. Electrochemical Society