Verhaverbeke, S. ; Futatsuki, T. ; Messoussi, R. ; Ohmi, T.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.1170-1181, 1994. Pennington, NJ. Electrochemical Society
Mertens, P.W. ; Verhaverbeke, S. ; Heyns, M.M. ; Hellemans, L. ; Snauwaert, J. ; Dillenbeck, K.
出版情報:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.102-110, 1994. Pennington, NJ. Electrochemical Society
Verneire, B. ; Rotondaro, A.L.P. ; Mertens, P.W. ; Verhaverbeke, S. ; Heyns, M.M.
出版情報:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.58-64, 1994. Pennington, NJ. Electrochemical Society
Meuris, M. ; Verhaverbeke, S. ; Mertens, P.W. ; Schmidt, H.F. ; Rotondaro, A.L.P. ; Heyns, M.M. ; Philipossian, A.
出版情報:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.15-25, 1994. Pennington, NJ. Electrochemical Society
Verhaverbeke, S. ; Meuris, M. ; Schmidt, H. ; Mertens, P. ; Heyns, M.
出版情報:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.176-185, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.184-192, 1997. Pennington, NJ. Electrochemical Society
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium. pp.87-90, 2001. Pennington, N.J.. Electrochemical Society
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium. pp.118-125, 2001. Pennington, N.J.. Electrochemical Society
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.23-26, 2003. Pennington, NJ. Electrochemical Society
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.496-504, 1997. Pennington, NJ. Electrochemical Society