Holsteyns, F. ; Riskin, A. ; Maes, A. ; Vereecke, G. ; Mertens, P.W.
出版情報:
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.161-167, 2003. Pennington, NJ. Electrochemical Society
Vereecke, G. ; Holsteyns, F. ; Veltens, J. ; Lux, M. ; Amauts, S. ; Kenis, K. ; Vos, R. ; Mertens, P. ; Heyns, M.
出版情報:
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.145-152, 2003. Pennington, NJ. Electrochemical Society
Xu, K. ; Vos, R. ; Vereecke, G. ; Mertens, P. ; Heyns, M. ; Vinckier, C. ; Fransaer, J.
出版情報:
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.137-144, 2003. Pennington, NJ. Electrochemical Society
Kesters, E. ; Ghekiere, J. ; Van Doorne, P. ; Vereecke, G. ; Mertens, P.W. ; Heyns, M.M.
出版情報:
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium. pp.15-22, 2003. Pennington, NJ. Electrochemical Society
Carbonell, L. ; Vereecke, G. ; Van Elshocht, S. ; Caymax, M. ; Van Hove, M. ; Maex, K. ; Mertens, P.
出版情報:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.150-159, 2003. Pennington, NJ. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Carbonell, L. ; Vereecke, G. ; Van Elshocht, S. ; Caymax, M. ; Van Hove, M. ; Maex, K. ; Mertens, P.
出版情報:
Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah. pp.150-159, 2003. Pennington, NJ. Electrochemical Society
Lauerhaas, J. ; Wu, Y. ; Xu, K. ; Vereecke, G. ; Vos, R. ; Kenis, K. ; Mertens, P. ; Nicolosi, T. ; Heyns, M.
出版情報:
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium. pp.147-155, 2001. Pennington, N.J.. Electrochemical Society