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Pulsed laser deposition of Ti:sapphire thin films using high-speed rotating target

著者名:
Nakata,Y. ( Kyushu Univ. )
Uetsuhara,H.
Goto,S.
Vasa,N.
Okada,T.
Maeda,M.
さらに 1 件
掲載資料名:
Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3618
発行年:
1999
開始ページ:
504
終了ページ:
511
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430885 [0819430889]
言語:
英語
請求記号:
P63600/3618
資料種別:
国際会議録

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