S.K. Haney ; V. Misra ; D.J. Lichtenwalner ; A.K. Agarwal
出版情報:
Silicon carbide and related materials 2012 : selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation. pp.707-710, 2013. Aedermannsdorf, Switzerland. Trans Tech Publications
Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan. pp.557-561, 2014. Aedermannsdorf, Switzerland. Trans Tech Publications
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 2: new materials, processes, and equipment. pp.275-288, 2006. Pennington, NJ. Electrochemical Society
C. Osburn ; S. Campbell ; A. Demkov ; E. Eisenbraun ; E. Garfunkel ; F. Gustafsson ; A. I. Kingon ; J. Lee ; D. Lichtenwalner ; G. Lucovsky ; T. Ma ; J. Maria ; V. Misra ; R. Nemanich ; G. Parsons ; D. Schlom ; S. Stemmer ; R. M. Wallace ; J. Whitten
出版情報:
Physics and technology of high-k gate dielectrics 4. pp.389-416, 2006. Pennington, N.J.. Electrochemical Society