1.

国際会議録
国際会議録
1. A NEW THIN FILM GROWTH/REGROWTH PROCESS DESIGN AND EXPERIMENTAL COMPARISONS WITH MOLECULAR DYNAMIC ANALYSES
Okada, Takako K. ; Kambayashi, Shigeru ; Yabuki, Moto ; Tsunashima, Yoshitaka ; Mikata, Yuichi ; Onga, Shinji
出版情報: Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.615-622,  1993.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 283
2.

国際会議録
国際会議録
2. ARSENIC DIFFUSION AND PRECIPITATION AT AsSG/Si INTERFACE
Tsunashima, Yoshitaka ; Kasio, Takako ; Kawaguchi, Hideichi ; Onga, Shinji ; Yamabe, Kikuo
出版情報: Characterization of the structure and chemistry of defects in materials : symposium held November 28-December 3, 1988, Boston, Massachusetts, U.S.A..  pp.569-574,  1989.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 138
3.

国際会議録
国際会議録
3. Dopant Diffusion In Silicon Substrate During Oxynitride
Aoki, Nobutoshi ; Yaegashi, Toshitake ; Takeuchi, Yuji ; Fujiwara, Makoto ; Kusunoki, Naoki ; Sato, Tsutomu ; Mizushima, Ichiro ; Tsunashima, Yoshitaka ; Hazama, Hiroaki ; Arotome, Seiichi ; Shirota, Riichiro ; Shimizu, Takashi
出版情報: Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A..  pp.B3.5-,  2001.  Warrendale, PA.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 610
4.

国際会議録
国際会議録
4. Highly Reliable Metal Gate nMOSFETs by Improved CVD-WSix Films With Work Function of 4.3eV
Nakajima, Kazuaki ; Nakazawa, Hiroshi ; Sekine, Katsuyuki ; Matsuo, Kouji ; Saito, Tomohiro ; Katata, Tomio ; Suguro, Kyoichi ; Tsunashima, Yoshitaka
出版情報: Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A..  pp.149-154,  2004.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 811