1.

国際会議録
国際会議録
1. A Few Thoughts on the Alleviation of Dishing and Erosion during Chemical-Mechanical Planarization for Shallow Trench Isolation
Tseng, Wei-Tsu ; Niu, James
出版情報: Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium.  pp.71-82,  1999.  Pennington, N. J..  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 99-37
2.

国際会議録
国際会議録
2. Slurry Dispersion and Frictional Behaviors during Chemical-Mechanical Polishing of Silicon Dioxide
Tseng, Wei-Tsu ; Lu, Rick ; Kuo, Ping-Lin ; Liao, Chin-Lung ; Lin, Jen-Fin
出版情報: Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium.  pp.280-286,  1999.  Pennington, N. J..  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 99-37
3.

国際会議録
国際会議録
3. Surface Characteristics, Etching Behaviors, and Chemical Mechanical Polishing of Aluminum Alloy Thin Films
Tseng, Wei-Tsu ; Wu, Jun ; Chang, Yee-Shyi
出版情報: Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A..  pp.125-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 477
4.

国際会議録
国際会議録
4. Thermal Stresses, Interfacial Reactions, and Microstructures of Al/Ti and Al/TiN Thin Films Encapsulated by SiOF
Tseng, Wei-Tsu ; Chen, Li-Wen ; Tu, G-C.
出版情報: Low-dielectric constant materials III : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.267-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 476
5.

国際会議録
国際会議録
5. Material Characterization and Chemical-Mechanical Polishing of Low-Dielectric Constant Fluorinated Silicon Dioxide Films
Tseng, Wei-Tsu ; Lin, Charles C.-F. ; Hsieh, Yuan-Tsu ; Feng, M.-S.
出版情報: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.441-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 427