Shiozawa, K. ; Oisbi, T. ; Maeda, H. ; Murakami, T. ; Yasumura, K. ; Abe, Y. ; Tokuda, Y.
出版情報:
ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology. pp.479-490, 1997. Pennington, NJ. Electrochemical Society
Kitagawa, A. ; Usami, A. ; Tokuda, Y. ; Wada, T. ; Kan, H. ; Murakami, T.
出版情報:
Advanced surface processes for optoelectronics : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.. pp.65-70, 1988. Pittsburgh, Pa.. Materials Research Society
Ueda, H. ; Kitagawa, A. ; Tokuda, Y. ; Usami, A. ; Wada, T. ; Kano, H.
出版情報:
Advanced surface processes for optoelectronics : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.. pp.221-226, 1988. Pittsburgh, Pa.. Materials Research Society
Usami, A. ; Tokuda, Y. ; Shiraki, H. ; Ueda, H. ; Wada, T. ; Kan, H. ; Murakami, T.
出版情報:
Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A.. pp.393-400, 1987. Pittsburgh, Pa.. Materials Research Society
Materials characterization : symposium held April 15-17, 1986, Palo Alto California, U.S.A.. pp.349-360, 1986. Pittsburgh, Pa.. Materials Research Society
Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.. pp.211-216, 1986. Pittsburgh, Pa.. Materials Research Society
Shiraki, H. ; Tokuda, Y. ; Tohyama, E. ; Sassa, K. ; Toyama, N.
出版情報:
Physics and applications of defects in advanced semiconductors : symposium held November 29-December 1, 1993, Boston, Massachusetts, U.S.A.. pp.425-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
III-V and IV-IV materials and processing challenges for highly integrated microelectronics and optoelectronics : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.. pp.243-, 1999. Warrendale, PA. MRS - Materials Research Society
Hasebe, Y. ; Ohshima, H. ; Hattori, T. ; Usami, A. ; Tokuda, Y.
出版情報:
Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A.. pp.623-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Nakakura, Y. ; Kato, M. ; Ichimura, M. ; Arai, E. ; Tokuda, Y.
出版情報:
Defect and impurity engineered semiconductors and devices III : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.167-172, 2002. Warrendale, Pa. Materials Research Society
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