Blank Cover Image

CHARACTERIZATION OF CHEMICAL-MECHANICAL POLISHING DIELECTRICS FOR MULTILEVEL METALLIZATION

著者名:
掲載資料名:
Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
337
発行年:
1994
開始ページ:
139
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992375 [1558992375]
言語:
英語
請求記号:
M23500/337
資料種別:
国際会議録

類似資料:

S. Morimoto, R. Breivogel, R. Gasser, S. Louke, P. Moon, R. Patterson, M. Prince

Electrochemical Society

W. Tseng, A. Sakamoto, S. Ponoth, D. Hong, L. Economikos, S. Vogt, A. Ticknor, S. Cohen, M. Krishnan, R. Wanner, B. Kim

Electrochemical Society

Tseng, Wei-Tsu, Lin, Charles C.-F., Hsieh, Yuan-Tsu, Feng, M.-S.

MRS - Materials Research Society

Zhou, C., Shan, L., Hight, J.R., Ng, S.H., Paszkowski, A.J., Tichy, J., Danyluk, S.

Materials Research Society

Tai, Y.L., Tsai, M.S., Tung, I.C., Dai, B.T., Feng, M.S.

Electrochemical Society

Golzarian, R., Gonzales, S., Luttzen, J., Sue, L., Wertsching, F.

Materials Research Society

Tsai, H.J., Chang, C.C., Jeng, Y.R., Chen, S.L.

Trans Tech Publications

Weling, M., Drill, C.

Electrochemical Society

Sun, S. C., Wang, L. S., Yeh, F. L.

MRS - Materials Research Society

Ramsdell, J., Seal, S., Obeng, Y., Decker, M. A., Stevie, F. A.

Electrochemical Society

Sivaram,. S., Tolles, R., Bath, H., Lee, E., Leggett

Materials Research Society

Teo, T.Y., Goh, W.L., Leong, L.S., Lim, V.S.K., Tse, T.Y., Chan, L.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12