Nakaharai, S. ; Tezuka, T. ; Sugiyama, N. ; Takagi, S. (MIRAI ASET)
出版情報:
SiGe: materials, processing, and devices : proceedings of the First international symposium. pp.741-748, 2004. Pennington, N.J.. Electrochemical Society
Takagi, S-I. ; Mizuno, T. ; Tezuka, T. ; Sugiyama, N ; Numata, T. ; Usuda, K. ; Monyama, Y. ; Nakaharai, S. ; Koga, J. ; Tanabe, A. ; Maeda, T.
出版情報:
Silicon-on-insulator technology and devices XI : proceedings of the international symposium. pp.159-174, 2003. Pennington, N.J.. Electrochemical Society