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RF AEROSOL MIST PLASMA DEPOSITION OF OXIDE FILMS

著者名:
Williams, J. A. A.
Shen, C. Q.
Vuong, K. D.
Tenpas, E.
Condrate, R. A., Sr.
Lee, D. H.
Wang, H.
Fagan, J.
Wang, X. W.
Stuckey, J.
DeMarco, M.
Yu, W.
Petrou, A.
さらに 8 件
掲載資料名:
Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
355
発行年:
1995
開始ページ:
563
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992566 [1558992561]
言語:
英語
請求記号:
M23500/355
資料種別:
国際会議録

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