RF AEROSOL MIST PLASMA DEPOSITION OF OXIDE FILMS
- 著者名:
Williams, J. A. A. Shen, C. Q. Vuong, K. D. Tenpas, E. Condrate, R. A., Sr. Lee, D. H. Wang, H. Fagan, J. Wang, X. W. Stuckey, J. DeMarco, M. Yu, W. Petrou, A. - 掲載資料名:
- Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 355
- 発行年:
- 1995
- 開始ページ:
- 563
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992566 [1558992561]
- 言語:
- 英語
- 請求記号:
- M23500/355
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
Annealing Effects of Indium-Tin Oxide Films Produced by Atmospheric RF Plasma Deposition Technique
MRS - Materials Research Society |
Society of Photo-optical Instrumentation Engineers |
Society of Photo-optical Instrumentation Engineers |
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
MRS - Materials Research Society |
Electrochemical Society |
MRS - Materials Research Society |
Electrochemical Society |
MRS - Materials Research Society |
Materials Research Society |