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出版情報:
Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes. pp.85-95, 1997. Pennington, NJ. Electrochemical Society
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出版情報:
Design and microfabrication of novel x-ray optics II : 5-6 August 2004, Denver, Colorado, USA. pp.73-79, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering