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Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.227-240, 2002. Pennington, NJ. Electrochemical Society
Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany. pp.35-50, 2001. Pennington, N.J.. Electrochemical Society
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