Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium. pp.201-211, 1999. Pennington, N.J.. Electrochemical Society
Interconnect and contact metallization for ULSI : proceedings of the international symposium. pp.152-161, 1999. Pennington, N.J.. Electrochemical Society
Proceedings of the Fourth International Symposium on Electrochemistry in Mineral and Metal Processing. pp.416-428, 1996. Pennington, NJ. Electrochemical Society
Woodman, A.S. ; Taylor, E.J. ; Anderson, E.B. ; Weil, R. ; Hong, S. ; Knapke, D.H. ; Fisher, G.L.
出版情報:
Proceedings of the Second International Symposium on Electrochemical Technology Applications in Electronics. pp.86-98, 1993. Pennington, NJ. Electrochemical Society
Electrochemical technology applications in electronics : proceedings of the third international symposium. pp.111-119, 1999. Pennington, NJ. Electrochemical Society
Proceedings of the Symposium on Environmental Aspects of Electrochemical Technology: applications in electronics. pp.16-28, 1996. Pennington, NJ. Electrochemical Society