1.

国際会議録
国際会議録
1. Resonant frequency method for monitoring MEMS fabrication
Tanner, D.M. ; Owen, A.C. ; Rodriguez, F. Jr.,
出版情報: Reliability, Testing, and Characterization of MEMS/MOEMS II.  pp.220-228,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4980
2.

国際会議録
国際会議録
2. Vapor deposition of amino-functionalized self-assembled monolayers on MEMS
Hankins, M.G. ; Resnick, P.J. ; Clews, P.J. ; Mayer, T.M. ; Wheeler, D.R. ; Tanner, D.M. ; Plass, R.A.
出版情報: Reliability, Testing, and Characterization of MEMS/MOEMS II.  pp.238-247,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4980
3.

国際会議録
国際会議録
3. Wear Mechanisms in a Reliability Methodology
Tanner, D.M. ; Dugger, M.T.
出版情報: Reliability, Testing, and Characterization of MEMS/MOEMS II.  pp.22-40,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4980
4.

国際会議録
国際会議録
4. Anodic oxidation-induced delamination of the SUMMiT poly 0 to Silicon Nitride Interface
Plass, R.A. ; Walraven, J.A. ; Tanner, D.M. ; Sexton, F.W.
出版情報: Reliability, Testing, and Characterization of MEMS/MOEMS II.  pp.81-86,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4980