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出版情報:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS 4 : new materials, processes and equipment. pp.263-274, 2008. Pennington, N.J.. Electrochemical Society
T. Baba ; T. Tezuka ; D. Ito ; T. Uchiyama ; H. Fujii
出版情報:
Tenth International Symposium on Gas Flow and Chemical Lasers : 5-9 September 1994, Friedrichshafen, Germany. pp.310-313, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
R. Kotegawa ; D. Ito ; T. Tezuka ; T. Uchiyama ; H. Fujii
出版情報:
Tenth International Symposium on Gas Flow and Chemical Lasers : 5-9 September 1994, Friedrichshafen, Germany. pp.281-285, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering