1.

国際会議録
国際会議録
1. Dynamics of the Vertical Distribution of CO2 and CO Concentrations over Western Siberia (1997-2003)
M.Yu. Arshinov ; B.D. Belam ; G. Inoue ; T. Machida ; M.V. Panchenko ; A.V. Fofonov
出版情報: Advances in the geological storage of carbon dioxide : international approaches to reduce anthropogenic greenhouse gas emissions.  pp.11-16,  2006.  Dordrecht.  Springer
シリーズ名: NATO science series. Series 4, Earth and environmental sciences
シリーズ巻号: 65
2.

国際会議録
国際会議録
2. Comparison of back side chrome focus monitor to focus self-metrology of an immersion scanner
K. D'have ; T. Machida ; D. Laidler ; S. Cheng
出版情報: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6518
3.

国際会議録
国際会議録
3. Double patterning design split implementation and validation for the 32nm node
M. Drapeau ; V. Wiaux ; E. Hendrickx ; S. Verhaegen ; T. Machida
出版情報: Design for manufacturability through design-process integration : 28 February-2 March 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6521