1.

国際会議録
国際会議録
1. High Throughput SiC Wafer Polishing with Good Surface Morphology
T. Kato ; K. Wada ; E. Hozomi ; H. Taniguchi ; T. Miura ; S.I. Nishizawa ; K. Arai
出版情報: Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006.  pp.753-756,  2007.  Stafa-Zuerich.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 556-557
2.

国際会議録
国際会議録
2. Defect and Growth Analysis of SiC Bulk Single Crystals with High Nitrogen Doping
T. Kato ; T. Miura ; K. Wada ; E. Hozomi ; H. Taniguchi ; S.I. Nishizawa ; K. Arai
出版情報: Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006.  pp.239-242,  2007.  Stafa-Zuerich.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 556-557
3.

国際会議録
国際会議録
3. Growth of 4H-SiC in Current-Controlled Liquid Phase Epitaxy
T. Mitani ; M. Okamura ; T. Takahashi ; N. Komatsu ; T. Kato
出版情報: Silicon carbide and related materials 2012 : selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation.  pp.3-6,  2013.  Aedermannsdorf, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 740-742
4.

国際会議録
国際会議録
4. Slicing of Rotating SiC Ingot by Electric Discharge Machining
N. Yamamoto ; S. Yamaguchi ; T. Kato
出版情報: Silicon carbide and related materials 2012 : selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation.  pp.843-846,  2013.  Aedermannsdorf, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 740-742
5.

国際会議録
国際会議録
5. Three-Dimensional Characterization of BaZrO3 Precipitates in Y1-xGdxBa2Cu3O7-y Prepared by TFA-MOD Using STEM-Tomography
T. Nishiyama ; K. Yamada ; R. Teranishi ; K. Kaneko ; T. Kato
出版情報: Advanced Materials Science and Technology : Selected, peer reviewed papers from the 8th International Forum on Advanced Materials Science and Technology (IFAMST 8) August 1-4, 2012, Fukuoka Institute of Technology, Japan.  pp.48-51,  2013.  Aedermannsdorf, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 750
6.

国際会議録
国際会議録
6. Growth Rate and Surface Morphology of 4H-SiC Single Crystal Grown under Various Supersaturations Using Si-C Solution
N. Komatsu ; T. Mitani ; T. Takahashi ; M. Okamura ; T. Kato
出版情報: Silicon carbide and related materials 2012 : selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6,2012, St. Petersburg, Russian Federation.  pp.23-26,  2013.  Aedermannsdorf, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 740-742
7.

国際会議録
国際会議録
7. Growth of Low Resistivity p-Type 4H-SiC Crystals by Sublimation with Using Aluminum and Nitrogen Co-Doping
K. Eto ; H. Suo ; T. Kato ; H. Okumura
出版情報: Silicon Carbide and Related Materials 2015 : [ICSCRM 2015] : selected, peer reviewed papers from the 16th International Conference on Silicon Carbide and Related Materials, October 4-9, 2015, Giardini Naxos, Italy.  pp.77-80,  2016.  Aedermannsdorf, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 858
8.

国際会議録
国際会議録
8. Effect of Solution Drift on Crystalline Morphology in the Solution Growth of Off-Axis 4HSiC Crystals
T. Kato ; K. Kusunoki ; K. Seki ; N. Okada ; K. Kamei
出版情報: Silicon Carbide and Related Materials 2015 : [ICSCRM 2015] : selected, peer reviewed papers from the 16th International Conference on Silicon Carbide and Related Materials, October 4-9, 2015, Giardini Naxos, Italy.  pp.65-68,  2016.  Aedermannsdorf, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 858
9.

国際会議録
国際会議録
9. Planarization of 6-Inch 4H-SiC Wafer Using Catalyst-Referred Etching
A. Isohashi ; Y. Sano ; T. Kato ; K. Yamauchi
出版情報: Silicon Carbide and Related Materials 2014 : Selected peer reviewed papers from the European Conference on Silicon Carbide & Related Materials (ECSCRM 2014), September 21-25, 2014, Grenoble, France.  pp.537-540,  2015.  Aedermannsdorf, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 821-823
10.

国際会議録
国際会議録
10. Chlorine Trifluoride Gas Transport and Etching Rate Distribution in Silicon Carbide Dry Etcher
D. Yajima ; K. Nakagomi ; H. Habuka ; T. Kato
出版情報: Silicon Carbide and Related Materials 2014 : Selected peer reviewed papers from the European Conference on Silicon Carbide & Related Materials (ECSCRM 2014), September 21-25, 2014, Grenoble, France.  pp.553-558,  2015.  Aedermannsdorf, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 821-823