1.

国際会議録
国際会議録
1. Film Crystallographic Texture and Substrate Surface Roughness in Layered Aluminum Metallization
Rodbell, K. P. ; Svilan, V. ; Gignac, L. M. ; DeHaven, P. W. ; Murphy, R. J. ; Licata, T. J.
出版情報: Materials reliability in microelectronics VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.261-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 428
2.

国際会議録
国際会議録
2. In Situ TEM Analysis of TiSi2 C49-C54 Transformations During Annealing
Gignac, L. M. ; Svilan, V. ; Clevenger, L. A. ; Cabral, C., Jr. ; Lavoie, C.
出版情報: Thin films - structure and morphology : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.255-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 441
3.

国際会議録
国際会議録
3. STRESS EVOLUTION DURING THE FORMATION AND TRANSFORMATION OF TITANIUM SILICIDE
Svilan, V. ; Harper, J. M. E. ; Cabral, C., Jr. ; Clevenger, L. A.
出版情報: Thin films, stresses and mechanical properties V : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A..  pp.167-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 356
4.

国際会議録
国際会議録
4. Dependence of Crystallographic Texture of C54 TiSi2 on Thickness and Linewidth in Submicron CMOS Structures
Svilan, V. ; Rodbell, K. P. ; Clevenger, L. A. ; Cabral, C., Jr. ; Roy, R. A. ; Lavoie, C. ; Jordan-Sweet, J. ; Harper, J. M. E.
出版情報: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.53-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 427