Sun, S. C. ; Chen, C. H. ; Lou, J. C. ; Yen, L. W. ; Lin, C. J.
出版情報:
Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A.. pp.241-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A.. pp.329-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Sun, S. C. ; Chiang, Y. C. ; Rosenmayer, C. T. ; Teguh, J. ; Wu, H.
出版情報:
Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A.. pp.85-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.. pp.139-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Sun, S. C. ; Wang, L. S. ; Yeh, F. L. ; Lai, T. S. ; Lin, Y. H.
出版情報:
Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.. pp.181-, 1994. Pittsburgh, PA. MRS - Materials Research Society
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