Marsden, K. ; Sadamitsu, S. ; Hourai, M. ; Sumita, S. ; Shigematsu, T.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.684-694, 1994. Pennington, NJ. Electrochemical Society
Hourai, M. ; Nagashima, T. ; Kajita, E. ; Miki, S. ; Sumita, S. ; Sano, M. ; Shigematsu, T.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.156-167, 1994. Pennington, NJ. Electrochemical Society
Sano, M. ; Sumita, S. ; Shigematsu, T. ; Fujino, N.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.784-795, 1994. Pennington, NJ. Electrochemical Society
Yanase, Y. ; Horie, H. ; Oka, Y. ; Sano, M. ; Sumita, S. ; Shigematsu, T.
出版情報:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.546-553, 1994. Pennington, NJ. Electrochemical Society
Sano, M. ; Hourai, M. ; Sumita, S. ; Shigematsu, T.
出版情報:
Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing. pp.3-15, 1993. Pennington, NJ. Electrochemical Society