1.

国際会議録
国際会議録
1. Synthesis of high-quality Si1-yCy and Si1-x-yGexCy epitaxial layers on (100)Si by ion implantation and pulsed excimer laser crystallization
Grob,J.-J. ; Fogarassy,E. ; Grob,A. ; Muller,D. ; Prevot,B. ; Stuck,R. ; de Unamuno,S. ; Boher,P. ; Stehle,M.X.
出版情報: ALT '97, International Conference on Laser Surface Processing : 8-12 September 1997, Limoges, France.  pp.47-56,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3404
2.

国際会議録
国際会議録
2. The growth of Si1-yCy/Si and Si1-x-yGexCy/Si heterostructures by ion implantation and pulsed excimer laser-induced epitaxy
Fogarassy,E. ; Grob,A. ; Grob,J.-J. ; Muller,D. ; Prevot,B. ; Stuck,R. ; Boher,P. ; Stehle,M.X.
出版情報: Laser Applications in Microelectronic and Optoelectronic Manufacturing II.  pp.202-210,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 2991