Influence of photoresist feature geometry on ECR plasma-etched HgCdTe trenches
- 著者名:
Benson, J.D. ( U.S. Army Night Vision & Electronic Sensors Directorate (USA) ) Stoltz, A.J., Jr. Kaleczyc, A.W. ( E-OIR Measurements, Inc. (USA) ) Martinka, M. ( U.S. Army Night Vision & Electronic Sensors Directorate (USA) ) Almeida, L.A. Boyd, P.R. ( Army Research Lab. (USA) ) Dinan, J.H. ( U.S. Army Night Vision & Electronic Sensors Directorate (USA) ) - 掲載資料名:
- Materials for infrared detectors II : 8-9 July 2002 ,Seattle, Washington, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4795
- 発行年:
- 2002
- 開始ページ:
- 129
- 終了ページ:
- 135
- 総ページ数:
- 7
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819445629 [0819445622]
- 言語:
- 英語
- 請求記号:
- P63600/4795
- 資料種別:
- 国際会議録
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