1.

国際会議録
国際会議録
1. Shallow Junctions for Sub-100 nm CMOS Technology
Meyssen, Veerle ; Stolk, Peter ; Zijl, Jeroen van ; Berkum, Jurgen van ; Wijgert, Willem van de ; Lindsay, Richard ; Dachs, Charles ; Mannino, Giovanni ; Cowern, Nick
出版情報: Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 669
2.

国際会議録
国際会議録
2. Optimization of Junctions formed by Solid Phase Epitaxial Regrowth for sub-70nm Cmos
Lindsay, Richard ; Pawlak, Bartlomiej J. ; Stolk, Peter ; Maex, Karen
出版情報: Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A..  pp.65-76,  2002.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 717