1.

国際会議録
国際会議録
1. A Study of Electrochemically Deposited Copper on PVD Copper and TiN Using a Cu-EDTA Complexed Bath
Graham, Lyndon ; Steinbruchel, Christoph ; Duquette, David J.
出版情報: Electrochemical processing in ULSI fabrication III : proceedings of the international symposium.  pp.53-65,  2000.  Pennington, N.J..  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2000-8
2.

国際会議録
国際会議録
2. MECHANISM OF REACTIVE ION ETCHING OF POLYMERIC FILMS IN OXYGEN-BASED PLASMAS
Graham, Sandra W. ; Steinbruchel, Christoph
出版情報: Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A..  pp.617-622,  1993.  Pittsburgh, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 282
3.

国際会議録
国際会議録
3. Characterization of PECVD Fluorinated Silicon Oxides and Stabilization of Interaction with Metals
Kim, Sarah E. ; Steinbruchel, Christoph ; Kumar, Atul ; Bakhru, H.
出版情報: Low-dielectric constant materials IV : symposium held April 14-16, 1998, San Francisco, California, U.S.A..  pp.191-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 511
4.

国際会議録
国際会議録
4. KINETICS OF REACTIVE ION ETCHING OF POLYMERS IN AN OXYGEN PLASMA: THE IMPORTANCE OF DIRECT REACTIVE ION ETCHING
Graham, Sandra W. ; Steinbruchel, Christoph
出版情報: Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.433-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 334
5.

国際会議録
国際会議録
5. HARDNESS AND TRIBOLOGICAL EFFECTS OF ION IMPLANTATION ON ELECTROPLATED CHROMIUM
Noll, Kathryn E. ; Steinbruchel, Christoph
出版情報: Thin films, stresses and mechanical properties V : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A..  pp.803-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 356