1.

国際会議録
国際会議録
1. Precise characterization of ultrathin nitride/oxide gate dielectrics by grazing X-ray reflectance and spectroscopic ellipsometry
Boher, Pierre ; Piel, Jean Philippe ; Stehle, Jean Louis
出版情報: Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.63-,  2000.  Warrendale, PA.  MRS-Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 592
2.

国際会議録
国際会議録
2. Precise Characterization of Resists and Thin Gate Dielectrics in the VUV Range for 157nm Lithography
Boher, Pierre ; Evrard, Patrick ; Piel, Jean Philippe ; Defranoux, Christophe ; Stehle, Jean Louis
出版情報: Nonlithographic and lithographic methods of nanofabrication--from ultralarge-scale integration to photonics to molecular electronics : symposium held November 26-December 1, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 636
3.

国際会議録
国際会議録
3. A new purged UV spectroscopic ellipsometer to characterize 157 nm nanolithographic materials
Boher, Pierre ; Piel, Jean Philippe ; Evrard, Patrick ; Stehle, Jean Louis
出版情報: Materials issues and modeling for device nanofabrication : symposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.177-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 584