New method for determination of the photoresist Dill parameters using spectroscopic ellipsometry
- 著者名:
- Boher, P. ( SOPRA S.A. (France) )
- Defranoux, C. ( SOPRA S.A. (France) )
- Piel, J. P. ( SOPRA S.A. (France) )
- Stehle, J. -L. P. ( SOPRA S.A. (France) )
- 掲載資料名:
- Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3678
- 発行年:
- 1999
- 開始ページ:
- 126
- 終了ページ:
- 137
- 総ページ数:
- 12
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431523 [0819431524]
- 言語:
- 英語
- 請求記号:
- P63600/3678-1
- 資料種別:
- 国際会議録
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1
国際会議録
New method for determination of the photoresist Dill parameters using spectroscopic ellipsometry
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SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering | |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |