Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A.. pp.123-128, 2005. Warrendale, Pa.. Materials Research Society
Kang, Young-Jae ; Hong, Yi-Koan ; Song, Jae-Hoon ; Kim, In-Kwon ; Park, Jin-Goo
出版情報:
Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A.. pp.153-158, 2005. Warrendale, Pa.. Materials Research Society
Materials issues in novel si-based technology : symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A.. pp.95-100, 2002. Warrendale, Pa.. Materials Research Society
Chemical-mechanical planarization - integration technology and realiability : symposium held March 28-31, 2005, San Francisco, California, U.S.A.. pp.35-40, 2005. Warrendale, Pa.. Materials Research Society