Bersuker, G. ; Peterson, J. ; Burnett, J. ; Korkin, A. ; Sim, J.H. ; Choi, R. ; Lee, B. H. ; Greer, J. ; Lysaght, P. ; Huff, H.R.
出版情報:
Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium. pp.141-145, 2005. Pennington, NJ. Electrochemical Society
Bersuker, G. ; Sim, J.H. ; Young, C.D. ; Choi, R. ; Lee, B.H. ; Lysaght, P. ; Brown, G.A. ; Zeitzoff, P.M. ; Gardner, M. ; Murto, R.W. ; Huff, H.R.
出版情報:
Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A.. pp.31-36, 2004. Warrendale, Pa.. Materials Research Society
Song, S.C. ; Bersuker, G. ; Zhang, Z. ; Lee, B.H. ; Huffman, C. ; Bae, S.H. ; Sim, J.H. ; Kirsch, P. ; Majhi, P. ; Moumen, N, ; Ramiller, C.
出版情報:
Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium. pp.456-470, 2005. Pennington, N.J.. Electrochemical Society
Kim, H.J. ; Song, I.C. ; Sim, J.H. ; Kim, D.J. ; Ihm, Y.E. ; Choo, W.K.
出版情報:
Designing, processing and properties of advanced engineering materials : proceedings of the 3rd International Symposium on Designing, Processing and Properties of Advanced Engineering Materials, held in Jeju, Korea, November 5-8, 2003. pp.509-512, 2004. Zuerich. Trans Tech Publications
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