Investigation of stress in aluminum thin film for MEMS applications
- 著者名:
- Shin, J.-W. ( Samsung Advanced Institute of Technology (Korea) )
- Chung, S.-W.
- Shim, D.-S.
- Shin, H.
- Koh, B.
- 掲載資料名:
- Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 4593
- 発行年:
- 2001
- 開始ページ:
- 263
- 終了ページ:
- 273
- 総ページ数:
- 11
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819443236 [0819443239]
- 言語:
- 英語
- 請求記号:
- P63600/4593
- 資料種別:
- 国際会議録
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