Kwak, J. S. ; Baik, H. K. ; Kim, H. ; Lee, J.-L. ; Shin, D. W. ; Park, C. G.
出版情報:
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.571-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Kwak, J. S. ; Baik, H. K. ; Lee, J. I. ; Noh, S. K. ; Shin, D. W. ; Park, C. G.
出版情報:
Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.. pp.337-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Shin, D. W. ; Park, C. G. ; Kwak, J. S. ; Baik, H. k.
出版情報:
Evolution of epitaxial structure and morphology : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.159-, 1996. Pittsburgh, Pennsylvania. MRS - Materials Research Society