1.

国際会議録
国際会議録
1. Oriented Growth of ZnO Thin Films on SiC Buffered Si(001) Substrates by Pulsed Laser Deposition
Yoo, C.J. ; Shim, Y.A. ; Moon, J.H. ; Kim, S.S. ; Lee, B.T. ; Kim, J.H.
出版情報: Designing, processing and properties of advanced engineering materials : proceedings of the 3rd International Symposium on Designing, Processing and Properties of Advanced Engineering Materials, held in Jeju, Korea, November 5-8, 2003.  pp.489-492,  2004.  Zuerich.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 449-452
2.

国際会議録
国際会議録
2. Mask process variation induced OPC accuracy in sub-90 nm technology node [6154-138]
Park, S.J. ; Shim, Y.A. ; Kang, J.H. ; Choi,J Y ; Yoon K H ; Lee Y S ; Kim K
出版情報: Optical Microlithography XIX.  pp.61543K-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 6154