Lai, B.-K. ; Hahm, G. ; You, L. ; Shih, C.-L. ; Kahn, H. ; Phillips, S.M. ; Heuer, A.H.
出版情報:
Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.. 2001. Warrendale, Pa.. Materials Research Society
Lin, 0. ; Hung, R. ; Lee, B. ; Wu, Y.-H. ; Kozuma, M. ; Shih, C.-L. ; Lin, J. ; Hsu, M. ; Hsu, S. D.
出版情報:
Photomask and Next-Generation Lithography Mask Technology XII. pp.835-843, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Chang, Y. Y. ; Wu, Y.-H. ; Shih, C.-L. ; Lin, J. ; Kan, F. ; Lin, J.
出版情報:
Photomask and Next-Generation Lithography Mask Technology XII. pp.757-766, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
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