Marsden, K. ; Sadamitsu, S. ; Hourai, M. ; Sumita, S. ; Shigematsu, T.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.684-694, 1994. Pennington, NJ. Electrochemical Society
Hourai, M. ; Nagashima, T. ; Kajita, E. ; Miki, S. ; Sumita, S. ; Sano, M. ; Shigematsu, T.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.156-167, 1994. Pennington, NJ. Electrochemical Society
Sano, M. ; Sumita, S. ; Shigematsu, T. ; Fujino, N.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.784-795, 1994. Pennington, NJ. Electrochemical Society
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.209-211, 2002. Pennington, NJ. Electrochemical Society
Yonezawa, H. ; Hidaka, V. ; Suzuki, M. ; Shigematsu, T.
出版情報:
High temperature superconductors : relationships between properties, structure, and solid-state chemistry. pp.219-228, 1989. Pittsburgh, Pa.. Materials Research Society
Adachi, N. ; Nishikawa, H. ; Komatsu, Y. ; Hourai, H. ; Sano, M ; Shigematsu, T.
出版情報:
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.815-822, 1992. Pittsburgh, Pa.. Materials Research Society
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.147-148, 2002. Pennington, NJ. Electrochemical Society
Yanase, Y. ; Horie, H. ; Oka, Y. ; Sano, M. ; Sumita, S. ; Shigematsu, T.
出版情報:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.546-553, 1994. Pennington, NJ. Electrochemical Society
Sugawara, Y. ; Ueyama, H. ; Uchihashi, T. ; Ohta, M. ; Yanase, Y. ; Shigematsu, T. ; Suzuki, M. ; Morita, S.
出版情報:
Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.15-, 1997. Pittsburgh, Penn. MRS - Materials Research Society
Sano, M. ; Hourai, M. ; Sumita, S. ; Shigematsu, T.
出版情報:
Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing. pp.3-15, 1993. Pennington, NJ. Electrochemical Society
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