Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing. pp.109-118, 1998. Pennington, N. J.. Electrochemical Society
Hsu, D.T. ; Kim, H.K. ; Shi, F.G. ; Zhao, B. ; Brongo, M.
出版情報:
Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues, proceedings of the fourth International Symposium and Thin Film Materials for Advanced Packaging Technologies : proceedings of the second International Symposium. pp.62-68, 1999. Pennington, N.J.. Electrochemical Society
Hsu, D.I. ; Kim, H.K. ; Shi, F.G. ; Chungpaiboonpatana, S. ; Davidson, C. ; Adams, J.M.
出版情報:
Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues, proceedings of the fourth International Symposium and Thin Film Materials for Advanced Packaging Technologies : proceedings of the second International Symposium. pp.209-226, 1999. Pennington, N.J.. Electrochemical Society
Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues, proceedings of the fourth International Symposium and Thin Film Materials for Advanced Packaging Technologies : proceedings of the second International Symposium. pp.53-61, 1999. Pennington, N.J.. Electrochemical Society
Hsu, D.T. ; Tong, H.Y. ; Shi, F.G. ; Lopatin, S. ; Shacham-Diamand, Y. ; Zhao, B. ; Brongo, M. ; Vasudev, P.K.
出版情報:
Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability. pp.72-83, 1998. Pennington, N.J.. Electrochemical Society
Advances in fiber lasers : 27-28 January, 2003, San Jose, California, USA. pp.121-127, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Advances in fiber lasers : 27-28 January, 2003, San Jose, California, USA. pp.106-111, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium. pp.547-563, 2005. Pennington, N.J.. Electrochemical Society