Seibt, M. ; Apel, M. ; Doeller, A. ; Ewe, H. ; Spiecker, E. ; Schroeter, W.
出版情報:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1064-1079, 1998. Pennington, NJ. Electrochemical Society
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.720-731, 1994. Pennington, NJ. Electrochemical Society
Ewe, H. ; Gilles, D. ; Hahn, S.K. ; Seibt, M. ; Schroeter, W.
出版情報:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.796-807, 1994. Pennington, NJ. Electrochemical Society
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.957-962, 1992. Pittsburgh, Pa.. Materials Research Society
Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.945-950, 1990. Pittsburgh, Pa.. Materials Research Society
Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.215-218, 1988. Pittsburgh, Pa.. Materials Research Society
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.1103-1108, 1992. Pittsburgh, Pa.. Materials Research Society
Istratov, A.A. ; Hedemann, H. ; Seibt, M. ; Vyvenko, O.F. ; Schroeter, W. ; Flink, C. ; Heiser, T. ; Hieslmair, H. ; Weber, E.R.
出版情報:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.948-972, 1998. Pennington, NJ. Electrochemical Society
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.243-258, 1997. Pennington, NJ. Electrochemical Society
国際会議録
