Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.567-577, 2002. Pennington, NJ. Electrochemical Society
Segal, A. ; Sid'ko, A.P. ; Karpov, S.Yu. ; Makarov, Yu. N.
出版情報:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.567-577, 2002. Pennington, NJ. Electrochemical Society
Mokhov, E. ; Smirnov, S. ; Segal, A. ; Bazarevskiy, D. ; Makarov, Y. ; Ramm, M. ; Helava, H.
出版情報:
Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003. pp.1545-1548, 2004. Uetikon-Zuerich. Trans Tech Publications
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