Egle, W.J. ; Hafner, W. ; Matthes, A. ; Erzin, E. ; Gaenswein, B. ; Schwarz, H. ; Marczuk, P. ; Antoni, M. ; Singer, W. ; Melzer, F. ; Hainz, J.
出版情報:
Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA. pp.39-49, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering