1.

国際会議録
国際会議録
1. Molecular Beam Epitaxial Growth of Heteropolytypic and Low-Dimensional Structures of SiC
Fissel, A. ; Kaiser, U. ; Schroter, B. ; KrauBlich, J. ; Hobert, H. ; Richter, W.
出版情報: Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999.  pp.205-208,  2000.  Zuerich, Switzerland.  Trans Tech Publications
シリーズ名: Materials science forum
シリーズ巻号: 338-342(1)
2.

国際会議録
国際会議録
2. Bonding and deep RIE: a powerful combination for high-aspect-ratio sensors and actuators
Hiller, K. ; Kuchler, M. ; Billep, D. ; Schroter, B. ; Dienel, M. ; Scheibner, D. ; Gessner, T.
出版情報: Micromachining and Microfabrication Process Technology X.  pp.80-91,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 5715