1.
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国際会議録
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Schmid, G.M. ; Burns, S.D. ; Stewart, M.D. ; Willson, C.G.
出版情報: |
Advances in Resist Technology and Processing XIX. Part One pp.381-390, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
シリーズ名: |
Proceedings of SPIE - the International Society for Optical Engineering |
シリーズ巻号: |
4690 |
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2.
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国際会議録
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Schmid, G.M. ; Stewart, M.D. ; Wang, C.-Y. ; Vogt, B.D. ; Prabhu, V.M. ; Lin, E.K. ; Willson, C.G.
出版情報: |
Advances in Resist Technology and Processing XXI. pp.333-342, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
シリーズ名: |
Proceedings of SPIE - the International Society for Optical Engineering |
シリーズ巻号: |
5376 |
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3.
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国際会議録
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Burns, S.D. ; Schmid, G.M. ; Trinque, B.C. ; Willson, J. ; Wunderlich, J. ; Tsiartas, P.C. ; Taylor, J.C. ; Burns, R.L. ; Wilson, C.G.
出版情報: |
Advances in Resist Technology and Processing XX. 2 pp.1063-1075, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering |
シリーズ名: |
Proceedings of SPIE - the International Society for Optical Engineering |
シリーズ巻号: |
5039 |
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4.
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国際会議録
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Stewart, M.D. ; Schmid, G.M. ; Goldfarb, D.L. ; Angelopoulos, M. ; Willson, C.G.
出版情報: |
Advances in Resist Technology and Processing XX. 1 pp.415-422, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering |
シリーズ名: |
Proceedings of SPIE - the International Society for Optical Engineering |
シリーズ巻号: |
5039 |
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5.
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国際会議録
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Burns, R.L. ; Johnson, S.C. ; Schmid, G.M. ; Kim, E.K. ; Dickey, M.D. ; Meiring, J. ; Burns, S.D. ; Stacey, N.A. ; Willson, C.G. ; Convey, D. ; Wei, Y. ; Fejes, P. ; Gehoski, K.A. ; Mancini, D.P. ; Nordquist, K.J. ; Dauksher, W.J. ; Resnick, D.J.
出版情報: |
Emerging Lithographic Technologies VIII. pp.348-360, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
シリーズ名: |
Proceedings of SPIE - the International Society for Optical Engineering |
シリーズ巻号: |
5374 |
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6.
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国際会議録
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Stewart, M.D. ; Becker, D.J. ; Stachowiak, T.B. ; Schmid, G.M. ; Michaelson, T.B. ; Tran, H.V. ; Willson, C.G.
出版情報: |
Advances in Resist Technology and Processing XIX. Part Two pp.943-951, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
シリーズ名: |
Proceedings of SPIE - the International Society for Optical Engineering |
シリーズ巻号: |
4690 |
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