ELTRAN Epitaxial Layer Thansfer (Invited)

ELTRAN Epitaxial Layer Thansfer (Invited)

著者名:

Sakaguchi, Tyonehara; K ( (Canon mc) )
Sato, N ( (Canon mc) )

掲載資料名:

Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

99-3

発行年:

1999

開始ページ:

111

終了ページ:

116

総ページ数:

6

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772259 [1566772257]

言語:

英語

請求記号:

E23400/99-3

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013933
シリーズID:	PA00000028
会議名:	International Symposium on Silicon-on-Insulator Technology and Devices ; Meeting of the Electrochemical Society
回次:	9th ; 195th
会議開催地:	Seattle, WA, USA
会議開催年:	1999.05.02-1999.05.07

類似資料:

1 国際会議録 Splittability in Double Porous Si Layers for ELTRAN Sakaguchi, K., Tsuboi, T., Yanagita, K., Okabe, T., Takahashi, K., Sato, N. Electrochemical Society	7 国際会議録 EPITAXIAL GROWTH ON POROUS Si FOR A NEW BOND AND ETCH-BACK SOI Sato, N., Sakaguchi, K., Yamagata, K., Fujiyama, Y., Yonehara, T. Electrochemical Society
2 国際会議録 ELTRAN(R); SOI-Epi WaferTM by Epitaxial Layer Transfer from Porous Si Yonehara, T., Sakaguchi, K. Electrochemical Society	8 国際会議録 Scalable Potential and Volume Production in ELTRAN (R); SOI-Epi WafersTM Sakaguchi, K., Yonehara, T. Electrochemical Society
3 国際会議録 ELTRAN by Splitting Porous Si Layers Sakaguchi, K, Yanagita, Y, Kurisu, H, Suzuki, H, Obmi, K, Yonehara, T Electrochemical Society	9 国際会議録 Noise-assisted propagation of signals through the chain of level-crossing detectors (Invited Paper) Fuchikami, N., Sakaguchi, T. SPIE-The International Society for Optical Engineering
4 国際会議録 ELTRAN (SOI-Epi Wafer) Technology Yonehara, T., Sakaguchi, K. Kluwer Academic Publishers	10 国際会議録 SEM and ECC Imaging Study of Step-Bunched Structure on 4H-SiC Epitaxial Layers Y. Tabuchi, M. Sonoda, K. Ashida, T. Kaneko, N. Ohtani, M. Katsuno, S. Sato, H. Tsuge, T. Fujimoto Trans Tech Publications
5 国際会議録 Epiaxial Layer Transfer by Bond and Etch-Back of Porous SI Yonehara, T., Sakaguchi, K., Sato, N. Electrochemical Society	11 国際会議録 Determination of Diffusivities of Si Self-Diffusion and Si Self-Interstitials using Isotopically Enriched Single- or Multi-30Si Epitaxial Layers Matsumoto, S., Aid, S.R., Sakaguchi, T., Toyonaga, K., Nakabayashi, Y., Sakuraba, M., Shimamune, Y., Hashiba, Y., … Materials Research Society
6 国際会議録 CVD-Epitaxial Growth on Porous Si for ELTRAN SOl-Epi Wafers Sato, N., Ishii, S., Yonehara, T. Electrochemical Society	12 国際会議録 Implant Isolation of ZnO Epitaxial Layers Kucheyev, S.O., Jagadish, C., Williams, J.S., Deenapanray, P.N.K., Yano, Mitsuaki, Koike, Kazuto, Sasa, Shigehiko, … Materials Research Society

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