1.

国際会議録
国際会議録
1. IC-compatible process for pattern transfer in deep wells for integration of RF components
Pham,N.P. ; Sarro,P.M. ; Burghartz,J.N.
出版情報: Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA.  pp.390-397,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4174
2.

国際会議録
国際会議録
2. Customized CMOS wavefront sensor
Monteiro,D.W.de Lima ; Vdovin,G. ; Rocha,J.G. ; Iordanov,V. ; Loktev,M. ; Sarro,P.M.
出版情報: High-resolution wavefront control : methods, devices, and applications III : 1-3 August 2001, San Diego, USA.  pp.88-99,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4493
3.

国際会議録
国際会議録
3. Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-processing surface micromachining
Pham,H.T.M. ; Boer,C.R.de ; Kwakernaak,K. ; Sloof,W.G. ; Sarro,P.M.
出版情報: Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA.  pp.272-279,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4557
4.

国際会議録
国際会議録
4. Direct spray coating of photoresist for MEMS applications
Pham,N.P. ; Scholtes,T.L.M. ; Klerk,R. ; Wieder,B. ; Sarro,P.M. ; Burghartz,J.N.
出版情報: Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA.  pp.312-319,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4557
5.

国際会議録
国際会議録
5. Technology for integrated spatial light modulators based on reflective membranes
Sakarya,S. ; Vdovin,G. ; Sarro,P.M.
出版情報: High-resolution wavefront control : methods, devices, and applications III : 1-3 August 2001, San Diego, USA.  pp.21-28,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 4493
6.

国際会議録
国際会議録
6. Low-temperature quartz-to-silicon bonding for SAW applications
Berthold,A. ; Sarro,P.M. ; Vallekoop,M.J.
出版情報: Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California.  pp.81-85,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3328
7.

国際会議録
国際会議録
7. Micromachined SLM based on pixelated reflective membranes
Sakarya,S. ; Vdovin,G.V. ; Sarro,P.M.
出版情報: High-resolution wavefront control : methods, devices, and applications : 19-20 July 1999, Denver, Colorado.  pp.23-31,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3760
8.

国際会議録
国際会議録
8. Recent progress in technology and applications of membrane micromachined deformable mirrors
Vdovin,G.V. ; Sarro,P.M. ; Gonte,F. ; Collings,N. ; Dandliker,R.
出版情報: High-resolution wavefront control : methods, devices, and applications : 19-20 July 1999, Denver, Colorado.  pp.2-11,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3760
9.

国際会議録
国際会議録
9. Integration technology (Invited Paper)
French,P.J. ; Sarro,P.M.
出版情報: Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California.  pp.60-71,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3328
10.

国際会議録
国際会議録
10. Determination of mechanical material properties of piezoelectric ZnO films
Koller,S. ; Ziebart,V. ; Paul,O. ; Brand,O. ; Baltes,H. ; Sarro,P.M. ; Vellekoop,M.J.
出版情報: Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California.  pp.102-109,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
シリーズ名: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号: 3328