1.

国際会議録
国際会議録
1. Study of Metal/Barrier/Low-K Interfaces for Interlayer Dielectric Applications
Chang, J.P. ; Case, C.B. ; Krautter, H.W. ; Sapjeta, J. ; Opila, R.L. ; Decker, M.A.
出版情報: Interconnect and contact metallization for ULSI : proceedings of the international symposium.  pp.261-269,  1999.  Pennington, N.J..  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 99-31
2.

国際会議録
国際会議録
2. Mechanistic Studies of Silicon Wafer Bonding and Layer Exfoliation
Weldon, M.K. ; Marsico, V.E. ; Chabal, Y.J. ; Agarwal, A. ; Eaglesham, D.J. ; Sapjeta, J. ; Brown, W.L. ; Jacobson, D.C. ; Caudano, Y. ; Christman, S.B. ; Chaban, E.E.
出版情報: Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications.  pp.229-248,  1997.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 97-36
3.

国際会議録
国際会議録
3. THE EFFECT OF DILUTE CLEANING AND RINSING CHEMISTRIES ON TRANSITION METAL REMOVAL AND Si SURFACE MICROROUGHNESS
Chang, J.P. ; Sapjeta, J. ; Rosamilia, J.M. ; Boone, T. ; Eng, J., Jr. ; Opila, R.L. ; Brennan, S. ; Wiemer, C. ; Pianetta, P.
出版情報: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.17-24,  1999.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 99-36
4.

国際会議録
国際会議録
4. ULTRAVIOLET LIGHT STIMULATED HALOGEN CHEMISTRY ON CLEANING SILICON SURFACES
Chang, J.P. ; Eng, J., Jr. ; Sapjeta, J. ; Opila, R.L. ; Cox, P. ; Pianetta, P.
出版情報: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.129-136,  1999.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 99-36
5.

国際会議録
国際会議録
5. High Performance, Highly Reliable Gate Oxide Formed with Rapid Thermal Oxidation In-Situ Steam Generation (ISSG) Technique
Ma, Y. ; Chen, Y.N. ; Brown, M.M ; Li, F. ; Chen, Y. ; Eng, J., Jr. ; Opila, R.L. ; Chabal, Y.J. ; Sapjeta, J. ; Muller, D.A. ; Xing, G.C. ; Trowbridge, T. ; Khau, M. ; Tam, N.
出版情報: Rapid thermal and other short-time processing technologies : proceedings of the international symposium.  pp.179-186,  2000.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 2000-9
6.

国際会議録
国際会議録
6. Hot Water Etching of Silicon Surfaces: New Insights of Mechanistic Understanding and Implications to Device Fabrication
Rosamilia, J. M. ; Boone, T. ; Sapjeta, J. ; Raghavachari, K. ; Higashi, G. S. ; Liu, Q.
出版情報: Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A..  pp.181-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 477
7.

国際会議録
国際会議録
7. Growth and Structure of Metallic Barrier Layer and Interconnect Films I: Experiments
Windt, D. L. ; Torre, J. Dalla ; Gilmer, G. H. ; Sapjeta, J. ; Kalyanaraman, R. ; Baumann, F. H. ; O'Sullivan, P. L. ; Dunn, D. ; Hull, R.
出版情報: Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A..  pp.307-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 564
8.

国際会議録
国際会議録
8. Relationship Between Interfacial Roughness and Dielectric Reliability for Silicon Oxynitride Gate Dielectrics Processed With Nitric Oxide
Sapjeta, J. ; Green, M. L. ; Chang, J. P. ; Silverman, P. J. ; Sorsch, T. W. ; Weir, B. E. ; Gladden, W. ; Ma, Y. ; Sung, C. Y. ; Lennard, W. N.
出版情報: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.289-,  1999.  Warrendale, PA.  MRS - Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 567
9.

国際会議録
国際会議録
9. Growth and Structure of Metallic Barrier Layer and Interconnect Films I: Experiments
Baumann, F. H. ; DallaTorre, J. ; Dunn, D. ; Gilmer, G. H. ; Hull, R. ; Kalyanaraman, R. ; O'Sullivan, P. L. ; Sapjeta, J. ; Windt, D. L.
出版情報: Polycrystalline metal and magnetic thin films : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.263-268,  1999.  Warrendale, PA.  Materials Research Society
シリーズ名: Materials Research Society symposium proceedings
シリーズ巻号: 562
10.

国際会議録
国際会議録
10. AFM Characterization of Semiconductor Materials and Devices
Hanson, K.J. ; Sapjeta, J. ; Higashi, G.S.
出版情報: Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.355-369,  1994.  Pennington, NJ.  Electrochemical Society
シリーズ名: Electrochemical Society Proceedings Series
シリーズ巻号: 1994-33