Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.276-283, 2001. Pennington, N.J.. Electrochemical Society
6th AIAA/NASA/ISSMO Symposium on Multidisciplinary Analysis and Optimization : a collection of technical papers, September 4-6, 1996, Bellevue, WA. pt. 2 pp.1568-1582, 1996. Reston, VA. American Institute of Aeronautics and Astronautics
シリーズ名:
AIAA Paper : Symposium on Multidisciplinary Analysis and Optimization