Sugino, R. ; Tada, Y. ; Ito, T. ; Okui, Y. ; Sakuma, J.
出版情報:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.328-335, 1997. Pennington, NJ. Electrochemical Society
Tamaki, Y. ; Sekita, H. ; Takasago, K. ; Sumiyoshi, T. ; Sakuma, J.
出版情報:
Commercial and biomedical applications of ultrafast lasers IV : 27-29 January 2004, San Jose, California, USA. pp.1-3, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Sakuma, J. ; Okui, Y. ; Miyazawa, H. ; Inoue, F. ; Miyajima, M.
出版情報:
Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.245-, 1998. Warrendale, Pa. MRS - Materials Research Society
Commercial and biomedical applications of ultrafast lasers III : 28-30 January 2003, San Jose, California, USA. pp.208-213, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
Sakuma, J. ; Okada, Y. ; Sumiyoshi, T. ; Sekita, H. ; Obara, M.
出版情報:
25th Annual BACUS Symposium on Photomask Technology. pp.599243-599243, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
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