Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006. pp.423-426, 2007. Stafa-Zuerich. Trans Tech Publications
Metrology, inspection, and process control for microlithography XXII. 2 pp.69223L-1-69223L-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
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Proceedings of SPIE - the International Society for Optical Engineering