Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.131-136, 1992. Pittsburgh, Pa.. Materials Research Society
Thin films : stresses and mechanical properties III : symposium held December 2-5, 1991, Boston, Massachusetts, U.S.A.. pp.87-92, 1992. Pittsburgh, Pa.. Materials Research Society
Roy, P. K. ; Laughery, M. A. ; Chacon, C. M. ; Kanan, A. M. ; Daugherty, T.
出版情報:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.403-, 1999. Warrendale, PA. MRS - Materials Research Society
Materials reliability in microelectronics VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A.. pp.409-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Roy, P. K. ; Brady, D. ; Chetlur, S. ; Ma, Y. ; Morse, K.
出版情報:
Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A.. pp.89-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society