Degraeve, R. ; Kaczer, B. ; Roussel, Ph. ; Groeseneken, G.
出版情報:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.475-488, 2002. Pennington, NJ. Electrochemical Society
Degraeve, R. ; Kaczer, B. ; Roussel, Ph. ; Groeseneken, G.
出版情報:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.475-488, 2002. Pennington, NJ. Electrochemical Society
Witvrouw, A. ; Bosscher, W. De ; Deweerdt, B. ; Verbeeck, R. ; Loosen, F. ; Roussel, Ph. ; Maex, K.
出版情報:
Thin films : stresses and mechanical properties IV : symposium held April 12-16, 1993, San Francisco, California, U.S.A.. pp.51-, 1993. Pittsburgh, Pa.. MRS - Materials Research Society
Witvrouw, A. ; Roussel, Ph. ; Deweerdt, B. ; Maex, K.
出版情報:
Materials reliability in microelectronics V : symposium held April 17-21, 1995, San Francisco, California, U.S.A.. pp.447-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Witvrouw, A. ; Proost, J. ; Deweerdt, B. ; Roussel, Ph. ; Maex, K.
出版情報:
Thin films, stresses and mechanical properties V : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.. pp.441-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society