Teerlinck, I. ; Schmidt, H.F. ; Rotondaro, A.L.P. ; Hurd, T.Q. ; Mouche, L. ; Mertens, P.W. ; Meuris, M. ; Heyns, M.M. ; Vanhaeren, D. ; Vandervorst, W.
出版情報:
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.284-291, 1995. Pennington, NJ. Electrochemical Society
Hurd, T.Q. ; Rotondaro, A.L.P. ; Sees, J. ; Misra, A. ; Appel, C.
出版情報:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.105-112, 1997. Pennington, NJ. Electrochemical Society
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.277-283, 1995. Pennington, NJ. Electrochemical Society
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.322-327, 1997. Pennington, NJ. Electrochemical Society
Rotondaro, A.L.P. ; Yang, H. ; Hu, J.C. ; Kraft, R. ; Brown, G. ; Appel, C.
出版情報:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.344-349, 1997. Pennington, NJ. Electrochemical Society
Rotondaro, A.L.P. ; Meuris, M. ; Schmidt, H.F. ; Heyns, M.M. ; Vandervorst, W. ; Claeys, C. ; Hellemans, L. ; Snauvaert, I.
出版情報:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.581-586, 1994. Pennington, NJ. Electrochemical Society
Eason, K. ; Jallepally, R. ; Noble, D. ; Hattangady, S. ; Khamankar, R. ; Rotondaro, A.L.P.
出版情報:
Rapid thermal and other short-time processing technologies : proceedings of the international symposium. pp.195-202, 2000. Pennington, NJ. Electrochemical Society
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.385-390, 1999. Pennington, NJ. Electrochemical Society
Simoen, E. ; Vandamme, E. ; Rotondaro, A.L.P. ; Claeys, C.
出版情報:
Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices. pp.318-323, 1994. Pennington, NJ. Electrochemical Society
Colombo, L. ; Visokay, M.R. ; Chambers, J.J. ; Rotondaro, A.L.P. ; Shanware, A. ; Bevan, M.J. ; Bu, H. ; Tsung, L.
出版情報:
Rapid thermal and other short-time processing technologies III : proceedings of the international symposium. pp.199-206, 2002. Pennington, NJ. Electrochemical Society