Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium. pp.406-417, 2003. Pennington, N.J.. Electrochemical Society
Roeloffzen, C.G.H. ; Ridder, R.M. ; Sengo, G. ; Woerhoff, K. ; Driessen, A.
出版情報:
Laser Diodes, Optoelectronic Devices, and Heterogenous Integration. pp.84-91, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering